共 18 条
- [2] APPELS JA, 1970, PHILIPS RES REP, V25, P118
- [3] BAPTIZMANSKY VV, 1977, OPT SPEKTROSK+, V43, P188
- [5] CHIN D, 1983, IEEE T ELECTRON DEV, V30, P744, DOI 10.1109/T-ED.1983.21204
- [8] HIRAO T, 1977, SEMICONDUCTOR SILICO, P1005
- [10] OXIDATION-INDUCED STRESS IN A LOCOS STRUCTURE [J]. IEEE ELECTRON DEVICE LETTERS, 1986, 7 (06) : 368 - 370