AMORPHOUS DIAMOND-LIKE CARBON-FILMS - EFFECT OF DEPOSITION RATE ON OPTICAL AND MECHANICAL-PROPERTIES

被引：7
作者：
MACKOWSKI, JM
PIGNARD, R
VEDOVOTTO, N
ROBERT, P
DONNADIEU, A
机构：
[1] SOC ANONYME TELECOMMUN,F-75013 PARIS,FRANCE
[2] UNIV MONTPELLIER 2,F-34060 MONTPELLIER,FRANCE
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1985年 / 77-8卷
关键词：
D O I：
10.1016/0022-3093(85)90790-2
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
6
引用
收藏
页码：837 / 840
页数：4
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