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DIFFUSION OF COPPER IN THIN TIN FILMS
被引:69
作者
:
CHAMBERLAIN, MB
论文数:
0
引用数:
0
h-index:
0
CHAMBERLAIN, MB
机构
:
来源
:
THIN SOLID FILMS
|
1982年
/ 91卷
/ 02期
关键词
:
D O I
:
10.1016/0040-6090(82)90429-1
中图分类号
:
T [工业技术];
学科分类号
:
08 ;
摘要
:
引用
收藏
页码:155 / 162
页数:8
相关论文
共 27 条
[1]
BARRETT CR, 1973, PRINCIPLES ENG MATER, P154
[2]
INVESTIGATION OF CONTACT METALLIZATION SYSTEMS FOR SOLAR-CELLS
CAMPBELL, RB
论文数:
0
引用数:
0
h-index:
0
CAMPBELL, RB
ROHATGI, A
论文数:
0
引用数:
0
h-index:
0
ROHATGI, A
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1980,
127
(12)
: 2702
-
2704
[3]
THERMAL-STABILITY OF TITANIUM NITRIDE FOR SHALLOW JUNCTION SOLAR-CELL CONTACTS
CHEUNG, NW
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
CHEUNG, NW
VONSEEFELD, H
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
VONSEEFELD, H
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
NICOLET, MA
HO, F
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
HO, F
ILES, P
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
ILES, P
[J].
JOURNAL OF APPLIED PHYSICS,
1981,
52
(06)
: 4297
-
4299
[4]
CHEUNG NW, 1980, P S THIN FILM INTERF, V80, P323
[5]
CHU WK, 1978, BACKSCATTERING SPECT, P354
[6]
Crank J., 1975, MATH DIFFUSION, P50
[7]
THIN-FILM INTERDIFFUSION .2. TI-RH, TI-PT, TI-RH-AU, AND TI-AU-RH
DEBONTE, WJ
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
DEBONTE, WJ
POATE, JM
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
POATE, JM
MELLIARSMITH, CM
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
MELLIARSMITH, CM
LEVESQUE, RA
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
LEVESQUE, RA
[J].
JOURNAL OF APPLIED PHYSICS,
1975,
46
(10)
: 4284
-
4290
[8]
TIN AS A DIFFUSION BARRIER IN THE TI-PT-AU BEAM-LEAD METAL SYSTEM
GARCEAU, WJ
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC, ALLENTOWN, PA 18103 USA
GARCEAU, WJ
FOURNIER, PR
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC, ALLENTOWN, PA 18103 USA
FOURNIER, PR
HERB, GK
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC, ALLENTOWN, PA 18103 USA
HERB, GK
[J].
THIN SOLID FILMS,
1979,
60
(02)
: 237
-
247
[9]
APPLICATION OF TI-W BARRIER METALLIZATION FOR INTEGRATED-CIRCUITS
GHATE, PB
论文数:
0
引用数:
0
h-index:
0
GHATE, PB
BLAIR, JC
论文数:
0
引用数:
0
h-index:
0
BLAIR, JC
FULLER, CR
论文数:
0
引用数:
0
h-index:
0
FULLER, CR
MCGUIRE, GE
论文数:
0
引用数:
0
h-index:
0
MCGUIRE, GE
[J].
THIN SOLID FILMS,
1978,
53
(02)
: 117
-
128
[10]
FORMALISM FOR EXTRACTING DIFFUSION-COEFFICIENTS FROM CONCENTRATION PROFILES
HALL, PM
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,555 UNION BLVD,ALLENTOWN,PA 18103
BELL TEL LABS INC,555 UNION BLVD,ALLENTOWN,PA 18103
HALL, PM
MORABITO, JM
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,555 UNION BLVD,ALLENTOWN,PA 18103
BELL TEL LABS INC,555 UNION BLVD,ALLENTOWN,PA 18103
MORABITO, JM
[J].
SURFACE SCIENCE,
1976,
54
(01)
: 79
-
90
←
1
2
3
→
共 27 条
[1]
BARRETT CR, 1973, PRINCIPLES ENG MATER, P154
[2]
INVESTIGATION OF CONTACT METALLIZATION SYSTEMS FOR SOLAR-CELLS
CAMPBELL, RB
论文数:
0
引用数:
0
h-index:
0
CAMPBELL, RB
ROHATGI, A
论文数:
0
引用数:
0
h-index:
0
ROHATGI, A
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1980,
127
(12)
: 2702
-
2704
[3]
THERMAL-STABILITY OF TITANIUM NITRIDE FOR SHALLOW JUNCTION SOLAR-CELL CONTACTS
CHEUNG, NW
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
CHEUNG, NW
VONSEEFELD, H
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
VONSEEFELD, H
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
NICOLET, MA
HO, F
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
HO, F
ILES, P
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
ILES, P
[J].
JOURNAL OF APPLIED PHYSICS,
1981,
52
(06)
: 4297
-
4299
[4]
CHEUNG NW, 1980, P S THIN FILM INTERF, V80, P323
[5]
CHU WK, 1978, BACKSCATTERING SPECT, P354
[6]
Crank J., 1975, MATH DIFFUSION, P50
[7]
THIN-FILM INTERDIFFUSION .2. TI-RH, TI-PT, TI-RH-AU, AND TI-AU-RH
DEBONTE, WJ
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
DEBONTE, WJ
POATE, JM
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
POATE, JM
MELLIARSMITH, CM
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
MELLIARSMITH, CM
LEVESQUE, RA
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
LEVESQUE, RA
[J].
JOURNAL OF APPLIED PHYSICS,
1975,
46
(10)
: 4284
-
4290
[8]
TIN AS A DIFFUSION BARRIER IN THE TI-PT-AU BEAM-LEAD METAL SYSTEM
GARCEAU, WJ
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC, ALLENTOWN, PA 18103 USA
GARCEAU, WJ
FOURNIER, PR
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC, ALLENTOWN, PA 18103 USA
FOURNIER, PR
HERB, GK
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC, ALLENTOWN, PA 18103 USA
HERB, GK
[J].
THIN SOLID FILMS,
1979,
60
(02)
: 237
-
247
[9]
APPLICATION OF TI-W BARRIER METALLIZATION FOR INTEGRATED-CIRCUITS
GHATE, PB
论文数:
0
引用数:
0
h-index:
0
GHATE, PB
BLAIR, JC
论文数:
0
引用数:
0
h-index:
0
BLAIR, JC
FULLER, CR
论文数:
0
引用数:
0
h-index:
0
FULLER, CR
MCGUIRE, GE
论文数:
0
引用数:
0
h-index:
0
MCGUIRE, GE
[J].
THIN SOLID FILMS,
1978,
53
(02)
: 117
-
128
[10]
FORMALISM FOR EXTRACTING DIFFUSION-COEFFICIENTS FROM CONCENTRATION PROFILES
HALL, PM
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,555 UNION BLVD,ALLENTOWN,PA 18103
BELL TEL LABS INC,555 UNION BLVD,ALLENTOWN,PA 18103
HALL, PM
MORABITO, JM
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,555 UNION BLVD,ALLENTOWN,PA 18103
BELL TEL LABS INC,555 UNION BLVD,ALLENTOWN,PA 18103
MORABITO, JM
[J].
SURFACE SCIENCE,
1976,
54
(01)
: 79
-
90
←
1
2
3
→