HIGH-PERFORMANCE MOLECULAR SECONDARY ION MASS-SPECTROMETRY (SIMS)

被引：2
作者：
CAMPANA, JE
BARLAK, TM
WYATT, JR
DECORPO, JJ
COLTON, RJ
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 04期
关键词：
D O I：
10.1116/1.571544
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1068 / 1069
页数：2
相关论文
共 16 条
[1]   COMBINED ION PROBE SPARK SOURCE ANALYSIS SYSTEM [J].
BANNER, AE ;
STIMPSON, BP .
VACUUM, 1974, 24 (10) :511-517
[2]   SECONDARY ION MASS-SPECTROMETRY OF METAL-HALIDES .1. STABILITY OF ALKALI IODIDE CLUSTERS [J].
BARLAK, TM ;
CAMPANA, JE ;
COLTON, RJ ;
DECORPO, JJ ;
WYATT, JR .
JOURNAL OF PHYSICAL CHEMISTRY, 1981, 85 (25) :3840-3844
[3]  
BARLAK TM, J AM CHEM SOC
[4]   SIMPLE ION PROBE ATTACHMENT FOR EXISTING MASS SPECTROMETERS [J].
BLATTNER, RJ ;
BAKER, JE ;
EVANS, CA .
ANALYTICAL CHEMISTRY, 1974, 46 (14) :2171-2176
[5]   EFFECT OF CLUSTER SURFACE ENERGIES ON SECONDARY-ION-INTENSITY DISTRIBUTIONS FROM IONIC-CRYSTALS [J].
CAMPANA, JE ;
BARLAK, TM ;
COLTON, RJ ;
DECORPO, JJ ;
WYATT, JR ;
DUNLAP, BI .
PHYSICAL REVIEW LETTERS, 1981, 47 (15) :1046-1049
[6]   ELEMENTARY THEORY OF THE QUADRUPOLE MASS FILTER [J].
CAMPANA, JE .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1980, 33 (02) :101-117
[7]   APPLICATION OF DYNAMIC EMITTANCE MATCHING TO SECONDARY ION MASS-SPECTROMETRY [J].
CAMPANA, JE ;
DECORPO, JJ ;
WYATT, JR .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1981, 52 (10) :1517-1520
[8]   CHARACTERIZATION OF POLYMERIC THIN-FILMS BY LOW-DAMAGE SECONDARY ION MASS-SPECTROMETRY [J].
CAMPANA, JE ;
DECORPO, JJ ;
COLTON, RJ .
APPLICATIONS OF SURFACE SCIENCE, 1981, 8 (03) :337-342
[9]  
CAMPANA JE, UNPUB
[10]   HIGH-PERFORMANCE SECONDARY ION MASS-SPECTROMETER [J].
COLTON, RJ ;
CAMPANA, JE ;
BARLAK, TM ;
DECORPO, JJ ;
WYATT, JR .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1980, 51 (12) :1685-1689
12