THERMIONIC DEPOSITION OF THIN-FILMS

被引：0
|
作者：
KUCHERENKO, ET [1 ]
SAENKO, VA [1 ]
机构：
[1] ACAD SCI UKSSR,NUCL RES INST,KIEV,UKSSR
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1976年 / 19卷 / 03期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：912 / 916
页数：5
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