ATOMIC SPECTROSCOPY AS A DIAGNOSTIC TOOL IN ION-BEAM CONTAMINATION PROBLEMS

被引：1

作者：

DOORN, S ^{[1
]}

FOSTER, C ^{[1
]}

HOOGKAMER, T ^{[1
]}

ROUKENS, H ^{[1
]}

SARIS, F ^{[1
]}

机构：

[1] FUNDAMENTAL ORG MATTER, INST ATOOM & MOLEC FYS, KRUISLAAN 407, AMSTERDAM, NETHERLANDS

来源：

NUCLEAR INSTRUMENTS & METHODS | 1974年 / 120卷 / 02期

关键词：

D O I：

10.1016/0029-554X(74)90065-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：371 / 373

页数：3

共 8 条

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[3] BEAM-GAS SPECTRA OF SILICON, SULFUR AND OXYGEN [J].

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MADDOX, WE ;

BRIDWELL, LB ;

DUNCAN, DD ;

BINGHAM, LL ;

ASBELL, JC .

NUCLEAR INSTRUMENTS & METHODS, 1973, 110 (JUL) :61-67

[4]

BOSCH JVD, 1969, PHYSICA, V40, P357

[5]

FOSTER C, TO BE PUBLISHED

[6] O-16 CONTAMINATION IN HE-4 ANALYSIS BEAMS [J].

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BORDERS, JA ;

LANGLEY, RA .

THIN SOLID FILMS, 1973, 19 (02) :371-380

[7]

Striganov A. R., 1966, TABLITSY SPEKTRALNYK

[8]

THOMAS EW, 1972, EXCITATION HEAVY PAR

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