ELASTIC RECOIL DETECTION ANALYSIS OF HYDROGEN CONTENT IN HYDROGENATED AMORPHOUS-SILICON FILMS

被引：0
作者：
KUDO, H
KAWAZU, Y
MIURA, A
ARAI, T
机构：
[1] Institute of Applied Physics, University of Tsukuba, Tsukuba, lbaraki
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 06期
关键词：
A-Si:H; Erd;
D O I：
10.1143/JJAP.29.1050
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
By using Rutherford elastic recoil induced by 60 MeV S7+, the hydrogen content in hydrogenated amorphous silicon films has been measured during annealing in vacuum. Decrease in the hydrogen content, resulting from hydrogen evolution, was observed when the samples were heated above 300°C. The results demonstrate the usefulness of this technique for measuring average hydrogen content within the films. © 1990 The Japan Society of Applied Physics.
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页码：1050 / 1051
页数：2
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