1.0-GHZ THIN-FILM BULK ACOUSTIC-WAVE RESONATORS ON GAAS

被引:43
|
作者
KLINE, GR [1 ]
LAKIN, KM [1 ]
机构
[1] IOWA STATE UNIV SCI & TECHNOL, AMES LAB, US DOE, AMES, IA 50011 USA
关键词
D O I
10.1063/1.94484
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:750 / 751
页数:2
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