PROPERTIES OF A LASER-PLASMA X-RAY SOURCE FOR X-RAY-LITHOGRAPHY

被引：4

作者：

CRAWFORD, EA ^{[1
]}

HOFFMAN, AL ^{[1
]}

ALBRECHT, GF ^{[1
]}

SOGARD, MR ^{[1
]}

机构：

[1] VARIAN ASSOCIATES,PALO ALTO,CA 94303

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 06期

关键词：

D O I：

10.1116/1.583676

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1575 / 1587

页数：13

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