ION-BEAM SPUTTER-DEPOSITED DIAMOND-LIKE FILMS

被引：57
作者：
BANKS, BA
RUTLEDGE, SK
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 03期
关键词：
D O I：
10.1116/1.571828
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：807 / 814
页数：8
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