THIN FILM THICKNESS DISTRIBUTION BY ALPHA-ABSORPTION

被引：12
作者：
DECROES, M
PARKER, W
SEVIER, K
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS | 1960年 / 7卷 / 02期
关键词：
D O I：
10.1016/0029-554X(60)90121-X
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：160 / 166
页数：7
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