ADSORPTION AND DESORPTION OF SULFUR ON A GAAS (001) SURFACE BY H2S EXPOSURE AND HEAT-TREATMENT

被引:18
作者
KAWANISHI, H
SUGIMOTO, Y
AKITA, K
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 03期
关键词
D O I
10.1116/1.585418
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The adsorption and desorption of sulfur on a GaAs (001) surface was studied using in situ Auger electron spectroscopy and reflection high-energy electron diffraction (RHEED). The H2S-treated surface showed a (2 x 1) sulfur-terminated structure, with the sulfur considered to be a few monolayers thick. RHEED patterns showed that the (2 x 1) reconstruction changed into an arsenic-stabilized (2 x 4) structure when heated to 590-degrees-C under an arsenic flux. A sulfur Auger signal on the H2S-treated surface was found to completely disappear upon heating. These data show that H2S exposure is appropriate for preparing a sulfur-terminated surface and that high-quality crystal regrowth is possible on the surface after being heat treated.
引用
收藏
页码:1535 / 1539
页数:5
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