SPATIAL-DISTRIBUTION OF IONS IMPLANTED INTO SOLIDS SUBJECT TO DIFFUSION AND SURFACE SPUTTERING

被引:28
作者
COLLINS, R
CARTER, G
机构
[1] UNIV SALFORD,DEPT MATH,SALFORD M5 4WT,LANCASHIRE,ENGLAND
[2] UNIV SALFORD,DEPT ELECT ENGN,SALFORD M5 4WT,LANCASHIRE,ENGLAND
来源
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1975年 / 26卷 / 03期
关键词
D O I
10.1080/00337577508234749
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
引用
收藏
页码:181 / 191
页数:11
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