FAST SEMICONDUCTOR THERMOELECTRIC DEVICES

The parameters of a thermoelectric radiation detector on a Bi//2Te//3 basis were calculated. Maximum specific detectivity requires a special geometric relation between the receiver area and the thermocouple leg dimensions. To obtain a response time in the millisecond range, thermocouple legs approximately 100 mu m long have to be produced. A flash evaporation equipment for the preparation of small thermocouples was developed, allowing the deposition of films up to 200 mu m thick. Semiconductor alloys of the system Bi//2// minus //xSb//xTe//3// plus //y were used for p- and n-type legs. A microthermocouple with film thickness of 100 mu m exhibited a response time of 10 ms when used as a Peltier element.