ATOMIC FORCE MICROSCOPY ON HOMOEPITAXIAL SRTIO3 FILMS GROWN UNDER MONITORING OF INTENSITY OSCILLATION IN REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION

被引：35

作者：

YOSHIMOTO, M ^{[1
]}

OHKUBO, H ^{[1
]}

KANDA, N ^{[1
]}

KOINUMA, H ^{[1
]}

HORIGUCHI, K ^{[1
]}

KUMAGAI, M ^{[1
]}

HIRAI, K ^{[1
]}

机构：

[1] KANAGAWA HIGH TECHNOL FDN,MAT CHARACTERIZAT LAB,TAKATSU KU,KAWASAKI 213,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 22期

关键词：

D O I：

10.1063/1.108100

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Homoepitaxial SrTiO3 film growth by laser molecular beam epitaxy (MBE) was tuned up to a level as to give not only fine streak in the reflection high energy electron diffraction (RHEED) pattern but also the intensity oscillation persisting more than 70 unit cell lengths. The films thus produced were verified to have atomically flat surfaces (root-mean-square roughness of 0.12 nm) and very high crystal quality (chi(min) of 2%) by the analyses of atomic force microscopy and the Rutherford backscattering, respectively.

引用

页码：2659 / 2661

页数：3

共 7 条

[1] ATOMIC FORCE MICROSCOPE
BINNIG, G
QUATE, CF
GERBER, C
[J]. PHYSICAL REVIEW LETTERS, 1986, 56 (09) : 930 - 933
[2] SCREW DISLOCATIONS IN HIGH-TC FILMS
GERBER, C
ANSELMETTI, D
BEDNORZ, JG
MANNHART, J
SCHLOM, DG
[J]. NATURE, 1991, 350 (6316) : 279 - 280
[3] GROWTH-MECHANISM OF SPUTTERED FILMS OF YBA2CU3O7 STUDIED BY SCANNING TUNNELING MICROSCOPY
HAWLEY, M
RAISTRICK, ID
BEERY, JG
HOULTON, RJ
[J]. SCIENCE, 1991, 251 (5001) : 1587 - 1589
[4] CERAMIC LAYER EPITAXY BY PULSED LASER DEPOSITION IN AN ULTRAHIGH-VACUUM SYSTEM
KOINUMA, H
NAGATA, H
TSUKAHARA, T
GONDA, S
YOSHIMOTO, M
[J]. APPLIED PHYSICS LETTERS, 1991, 58 (18) : 2027 - 2029
[5] FABRICATION AND ANOMALOUS CONDUCTING BEHAVIOR OF ATOMICALLY REGULATED (SRVO3-X)/(SRTIO3-Y) SUPERLATTICES
KOINUMA, H
YOSHIMOTO, M
NAGATA, H
TSUKAHARA, T
[J]. SOLID STATE COMMUNICATIONS, 1991, 80 (01) : 9 - 13
[6] FABRICATION OF CERAMICS HETEROJUNCTIONS AND LAYERED CUPRATES BY EPITAXIAL LAYER-BY-LAYER GROWTH
YOSHIMOTO, M
NAGATA, H
GONDA, S
GONG, JP
OHKUBO, H
KOINUMA, H
[J]. PHYSICA C, 1991, 190 (1-2): : 43 - 45
[7] YOSHIMOTO M, IN PRESS JPN J APPL

← 1 →