DIGITAL WAVE-FRONT MEASURING INTERFEROMETRY - SOME SYSTEMATIC-ERROR SOURCES

被引:681
作者
SCHWIDER, J [1 ]
BUROW, R [1 ]
ELSSNER, KE [1 ]
GRZANNA, J [1 ]
SPOLACZYK, R [1 ]
MERKEL, K [1 ]
机构
[1] JENOPTIK GMBH, JENA, GERMANY
关键词
D O I
10.1364/AO.22.003421
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:3421 / 3432
页数:12
相关论文
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