SURFACE-COMPOSITION AND STRUCTURE CHANGES IN GAAS COMPOUNDS DUE TO LOW-ENERGY AR+ ION-BOMBARDMENT

被引：37
作者：
KANG, HJ
MOON, YM
KANG, TW
LEEM, JY
LEE, JJ
MA, DS
机构：
[1] DONG GUK UNIV,DEPT PHYS,SEOUL 100715,SOUTH KOREA
[2] ELECTR & TELECOMMUN RES INST,TAEJON,SOUTH KOREA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 06期
关键词：
D O I：
10.1116/1.576344
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：3251 / 3255
页数：5
相关论文
共 26 条
[1]   STOICHIOMETRY EFFECTS AT NIMO SURFACES UNDER BOMBARDMENT WITH AR+ IONS FROM 40 TO 2000 EV [J].
BARTELLA, J ;
OECHSNER, H .
SURFACE SCIENCE, 1983, 126 (1-3) :581-588
[2]  
BEHRISH R, 1981, SPUTTERING PARTICLE, V1
[3]  
Behrish R., 1983, SPUTTERING PARTICLE, VII
[4]   COMPOSITION AND STRUCTURE OF DIFFERENTLY PREPARED GAAS(100) SURFACES STUDIED BY LEED AND AES [J].
DRATHEN, P ;
RANKE, W ;
JACOBI, K .
SURFACE SCIENCE, 1978, 77 (01) :L162-L166
[5]  
ECKSTEIN W, 1984, NUCL INSTRUM METH B, V2, P814
[6]  
GSHNEIDNER KA, 1964, SOLID STATE PHYS, V16
[7]  
HERMANDEZ CALDE.I, 1983, PHYS REV B, V27, P4961
[8]   BACKSCATTERING CORRECTION FOR QUANTITATIVE AUGER ANALYSIS .2. VERIFICATIONS OF THE BACKSCATTERING FACTORS THROUGH QUANTIFICATION BY AES [J].
ICHIMURA, S ;
SHIMIZU, R ;
IKUTA, T .
SURFACE SCIENCE, 1982, 115 (02) :259-269
[9]   PREFERENTIAL SPUTTERING OF TIC UNDER KEV AR+ION BOMBARDMENT - SIMULTANEOUS SPUTTERING ISS MEASUREMENT WITH HE+ AND AR+ IONS [J].
KANG, HJ ;
MATSUDA, Y ;
SHIMIZU, R .
SURFACE SCIENCE, 1983, 134 (01) :L500-L504
[10]  
KANG HJ, 1984, SURF SCI, V144, P541, DOI 10.1016/0039-6028(84)90116-X
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