ANALYTICAL STUDY OF PLATINUM SILICIDE FORMATION

被引：58

作者：

BINDELL, JB

COLBY, JW

WONSIDLER, DR

POATE, JM

CONLEY, DK

TISONE, TC

机构：

[1] BELL TEL LABS INC,ALLENTOWN,PA 18103

[2] BELL TEL LABS INC,MURRAY HILL,NJ 07974

[3] WESTERN ELECT CO INC,ALLENTOWN,PA 18103

[4] GOULD INC,ROLLING MEADOWS,IL 60008

来源：

THIN SOLID FILMS | 1976年 / 37卷 / 03期

关键词：

D O I：

10.1016/0040-6090(76)90612-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：441 / 452

页数：12

共 14 条

[1]

ANDERSEN CA, 1969, INT J MASS SPECTROM, V2, P61

[2]

BROWN WC, UNPUBLISHED DATA

[3]

CHANG CC, 1974, CHARACTERIZATION SOL

[4] COMPARISON OF BACKSCATTERING SPECTROMETRY AND SECONDARY ION MASS-SPECTROMETRY BY ANALYSIS OF TANTALUM PENTOXIDE LAYERS [J].

CHU, WK ;

NICOLET, MA ;

MAYER, JW ;

EVANS, CA .

ANALYTICAL CHEMISTRY, 1974, 46 (14) :2136-2141

[5] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J].

CHU, WK ;

MAYER, JW ;

NICOLET, MA ;

BUCK, TM ;

AMSEL, G ;

EISEN, F .

THIN SOLID FILMS, 1973, 17 (01) :1-41

[6]

CHU WK, 1974, ION BEAM SURFACE LAY, P423

[7]

COLBY JW, 1971, 6TH P NAT C EL PROB

[8] PLATINUM SILICIDE FORMATION - ELECTRON-SPECTROSCOPY OF PLATINUM-PLATINUM SILICIDE INTERFACE [J].

DANYLUK, S ;

MCGUIRE, GE .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (12) :5141-5144

[9] INTERACTION OF AL LAYERS WITH POLYCRYSTALLINE SI [J].

NAKAMURA, K ;

NICOLET, MA ;

MAYER, JW ;

BLATTNER, RJ ;

EVANS, CA .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (11) :4678-4684

[10] KINETICS AND MECHANISM OF PLATINUM SILICIDE FORMATION ON SILICON [J].

POATE, JM ;

TISONE, TC .

APPLIED PHYSICS LETTERS, 1974, 24 (08) :391-393

← 1 2 →