LASER-PHOTOETCHING CHARACTERISTICS OF POLYMERS WITH DOPANTS

[1] DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J]. APPLIED PHYSICS LETTERS, 1983, 43 (08) : 717 - 719

[2] PULSED CO2-LASER ETCHING OF POLYIMIDE [J]. APPLIED PHYSICS LETTERS, 1986, 48 (18) : 1226 - 1228

[3] EXCIMER LASER ETCHING OF POLYIMIDE [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) : 2036 - 2043

[4] ELECTRONICALLY EXCITED PHOTODISSOCIATION AND DESORPTION OF MOLECULES ON SURFACES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 473 - 475

[5] Chuang Tzu-Cheng, UNPUB

[6] COLE HS, 1986, MATER RES SOC S P, V72, P241

[7] SELF-DEVELOPING UV PHOTORESIST USING EXCIMER LASER EXPOSURE [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) : 7201 - 7204

[8] ELECTRONICALLY EXCITED PHOTODISSOCIATION AND DESORPTION OF ADSORBATES - CH2I2 ON AL2O3 AND AG SURFACES [J]. PHYSICAL REVIEW LETTERS, 1987, 59 (13) : 1484 - 1487

[9] Forster T., 1975, EXCIMERS EXCIPLEXES, P1

[10] LASER ABLATION OF ORGANIC POLYMERS - MICROSCOPIC MODELS FOR PHOTOCHEMICAL AND THERMAL-PROCESSES [J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) : 2909 - 2914

[1] DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J]. APPLIED PHYSICS LETTERS, 1983, 43 (08) : 717 - 719

[2] PULSED CO2-LASER ETCHING OF POLYIMIDE [J]. APPLIED PHYSICS LETTERS, 1986, 48 (18) : 1226 - 1228

[3] EXCIMER LASER ETCHING OF POLYIMIDE [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) : 2036 - 2043

[4] ELECTRONICALLY EXCITED PHOTODISSOCIATION AND DESORPTION OF MOLECULES ON SURFACES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 473 - 475

[5] Chuang Tzu-Cheng, UNPUB

[6] COLE HS, 1986, MATER RES SOC S P, V72, P241

[7] SELF-DEVELOPING UV PHOTORESIST USING EXCIMER LASER EXPOSURE [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) : 7201 - 7204

[8] ELECTRONICALLY EXCITED PHOTODISSOCIATION AND DESORPTION OF ADSORBATES - CH2I2 ON AL2O3 AND AG SURFACES [J]. PHYSICAL REVIEW LETTERS, 1987, 59 (13) : 1484 - 1487

[9] Forster T., 1975, EXCIMERS EXCIPLEXES, P1

[10] LASER ABLATION OF ORGANIC POLYMERS - MICROSCOPIC MODELS FOR PHOTOCHEMICAL AND THERMAL-PROCESSES [J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) : 2909 - 2914