LASER-PHOTOETCHING CHARACTERISTICS OF POLYMERS WITH DOPANTS

被引:69
作者
CHUANG, TJ
HIRAOKA, H
MODL, A
机构
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 45卷 / 04期
关键词
D O I
10.1007/BF00617932
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:277 / 288
页数:12
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