DETERMINATION OF CONCENTRATION PROFILE IN THIN METALLIC-FILMS - APPLICATIONS AND LIMITATIONS OF HE+ BACKSCATTERING

被引：36

作者：

CAMPISANO, SU ^{[1
]}

FOTI, G ^{[1
]}

GRASSO, F ^{[1
]}

RIMINI, E ^{[1
]}

机构：

[1] UNIV CATANIA,IST STRUTTURA MAT,CORSO ITALIA 57,195129 CATANIA,ITALY

来源：

THIN SOLID FILMS | 1975年 / 25卷 / 02期

关键词：

D O I：

10.1016/0040-6090(75)90061-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：431 / 440

页数：10

共 8 条

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[2] THEORETICAL ANALYSIS OF ENERGY-SPECTRA OF BACKSCATTERED IONS [J].

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THIN SOLID FILMS, 1973, 19 (01) :121-135

[3] LOW-TEMPERATURE INTERDIFFUSION IN COPPER-GOLD THIN-FILMS ANALYZED BY HELIUM BACKSCATTERING [J].

CAMPISAN.SU ;

FOTI, G ;

GRASSO, F ;

RIMINI, E .

THIN SOLID FILMS, 1973, 19 (02) :339-348

[4]

CAMPISANO SU, 1974, APPLICATIONS ION BEA, P159

[5]

CHU WH, TO BE PUBLISHED

[6] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J].

CHU, WK ;

MAYER, JW ;

NICOLET, MA ;

BUCK, TM ;

AMSEL, G ;

EISEN, F .

THIN SOLID FILMS, 1973, 17 (01) :1-41

[7]

KRAUTLE H, 1973, J APPL PHYS, V44, P3851

[8] ANALYSIS OF THIN-FILM STRUCTURES WITH NUCLEAR BACKSCATTERING AND X-RAY-DIFFRACTION [J].

MAYER, JW ;

TU, KN .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01) :86-93

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