THE INTERNAL-STRESS IN THIN SILVER, COPPER AND GOLD-FILMS

被引：151
作者：
ABERMANN, R
KOCH, R
机构：
来源：
THIN SOLID FILMS | 1985年 / 129卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(85)90096-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：71 / 78
页数：8
相关论文
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