THE INTERNAL-STRESS IN THIN SILVER, COPPER AND GOLD-FILMS

被引：151

作者：

ABERMANN, R

KOCH, R

机构：

来源：

THIN SOLID FILMS | 1985年 / 129卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(85)90096-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：71 / 78

页数：8

相关论文

共 12 条

[1] INSITU DETERMINATION OF THE STRUCTURE OF THIN METAL-FILMS BY INTERNAL-STRESS MEASUREMENTS - STRUCTURE DEPENDENCE OF SILVER AND COPPER-FILMS ON OXYGEN-PRESSURE DURING DEPOSITION
ABERMANN, R
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[2] STRUCTURE AND INTERNAL-STRESS IN ULTRATHIN SILVER FILMS DEPOSITED ON MGF2 AND SIO SUBSTRATES
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[3] INTERNAL-STRESS OF THIN SILVER AND GOLD-FILMS AND ITS DEPENDENCE ON GAS-ADSORPTION
ABERMANN, R
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[J]. THIN SOLID FILMS, 1979, 62 (02) : 195 - 208
[4] STRESS IN VACUUM DEPOSITED FILMS OF SILVER
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[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1967, 6 (01) : 42 - +
[5] ON THE INFLUENCE OF THERMAL EFFECTS ON INTERNAL-STRESS MEASUREMENTS DURING AND AFTER DEPOSITION OF SILVER, GOLD AND COPPER-FILMS
KOCH, R
ABERMANN, R
[J]. THIN SOLID FILMS, 1985, 129 (1-2) : 63 - 70
[6] KOCH RD, UNPUB
[7] MEASUREMENT OF THE INTRINSIC STRESS IN THIN-FILMS OF SILVER BY A NEW CANTILEVERED PLATE TECHNIQUE
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[J]. THIN SOLID FILMS, 1981, 75 (03) : 213 - 219
[8] MECHANICAL-PROPERTIES OF OPTICAL FILMS
PULKER, HK
[J]. THIN SOLID FILMS, 1982, 89 (02) : 191 - 204
[9] MEASUREMENT OF AVERAGE SURFACE STRESS OF GOLD AS A FUNCTION OF TEMPERATURE IN TEMPERATURE RANGE 50-985 DEGREES
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[10] DETERMINATION OF SURFACE STRESS OF COPPER AND PLATINUM
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[J]. SURFACE SCIENCE, 1972, 32 (01) : 168 - +