SEM STUDIES OF METAL-OXIDE-SILICON CAPACITORS

被引：0
|
作者：
ROITMAN, P [1 ]
BOTTOMS, WR [1 ]
机构：
[1] PRINCETON UNIV,DEPT ELECT ENGN,PRINCETON,NJ 08540
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1976年 / 5卷 / 04期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：450 / 450
页数：1
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