ELECTRON CURRENTS IN THE SPECIMEN CHAMBER OF A SCANNING MICROSCOPE

被引：10
作者：
OATLEY, CW
机构：
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1983年 / 16卷 / 04期
关键词：
D O I：
10.1088/0022-3735/16/4/015
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：308 / 312
页数：5
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[5]   MEASURING THE BACKSCATTERING COEFFICIENT AND SECONDARY-ELECTRON YIELD INSIDE A SCANNING ELECTRON-MICROSCOPE [J].
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