An integrated MEMS piezoresistive tri-axis accelerometer

被引：0

作者：

Zhang Yongping ^{[1
,2
]}

He Changde ^{[1
,2
]}

Yu Jiaqi ^{[1
]}

Du Chunhui ^{[2
]}

Zhang Juanting ^{[1
]}

Chou Xiujian ^{[1
,2
]}

Zhang Wendong ^{[1
,2
]}

机构：

[1] North Univ China, Key Lab Instrumentat Sci & Dynam Measurement, Minist Educ, Taiyuan 030051, Peoples R China

[2] North Univ China, Key Lab Sci & Technol Elect Test & Measurement, Taiyuan 030051, Peoples R China

来源：

JOURNAL OF SEMICONDUCTORS | 2013年 / 34卷 / 10期

关键词：

accelerometer; integration; piezoresistive; tri-axis; MEMS;

D O I：

10.1088/1674-4926/34/10/104009

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

An integrated MEMS accelerometer has been designed and fabricated. The device, which is based on the piezoresistive effect, accomplishes the detection of three components of acceleration by using piezoresistors to compose three Wheatstone bridges that are sensitive to the only given orientation. The fabrication of the accelerometer is described, and the theory behind its operation developed. Experimental results on sensitivity, cross-axis-coupling degree, and linearity are presented. The sensitivity of X Y and Z were 5.49 mV/g, 5.12 mV/g and 4.82 mV/g, respectively; the nonlinearity of X, Y and Z were 0.01%, 0.04% and 0.01%, respectively; the cross-axis-coupling factor of X axis to Y axis and Z axis are 0.119% and 2.26%; the cross-axis-coupling factor of Y axis to X axis and Z axis are 0.157% and 4.12%; the cross-axis-coupling factor of Z axis to X axis and Y axis are 0.511% and 0.938%. The measured performance indexes attain accurate vector-detection in practical applications, and even at a navigation level. In conclusion, the accelerometer is a highly integrated sensor.

引用

页数：7

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