ELECTRON VIBRATIONAL SPECTROSCOPY OF THIN POLYIMIDE FILMS

被引：29

作者：

DINARDO, NJ ^{[1
]}

DEMUTH, JE ^{[1
]}

CLARKE, TC ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF CHEMICAL PHYSICS | 1986年 / 85卷 / 11期

关键词：

D O I：

10.1063/1.451405

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：6739 / 6749

页数：11

共 19 条

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[8] CHEMICAL BONDING AT THE POLYIMIDE SURFACE [J].

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[9] VIBRATIONAL STUDY OF THE INITIAL-STAGES OF THE OXIDATION OF SI(111) AND SI(100) SURFACES [J].

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