INVESTIGATIONS ON ULTRATHIN SILICON-NITRIDE AND SILICON DIOXIDE FILMS IN NONVOLATILE SEMICONDUCTOR MEMORY TRANSISTORS

被引：0
作者：
ROY, A [1 ]
LIBSCH, FR [1 ]
WHITE, MH [1 ]
机构：
[1] LEHIGH UNIV,SHERMAN FAIRCHILD CTR,BETHLEHEM,PA 18015
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：C316 / C316
页数：1
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