LOW-POWER ION-BEAM-ASSISTED ETCHING OF INDIUM-PHOSPHIDE

被引：32

作者：

DEMEO, NL

DONNELLY, JP

ODONNELL, FJ

GEIS, MW

OCONNOR, KJ

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

10.1016/0168-583X(85)90475-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：814 / 819

页数：6

共 19 条

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[4]

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[9]

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