OPTICAL AND DIELECTRIC-PROPERTIES OF THIN SIOX FILMS OF VARIABLE COMPOSITION

被引：45
作者：
SHABALOV, AL
FELDMAN, MS
机构：
来源：
THIN SOLID FILMS | 1983年 / 110卷 / 03期
关键词：
D O I：
10.1016/0040-6090(83)90239-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：215 / 224
页数：10
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