SELF-ALIGNED SUB-MICRON GATE DIGITAL GAAS INTEGRATED-CIRCUITS

被引：17
|
作者：
LEVY, HM
LEE, RE
机构：
来源：
IEEE ELECTRON DEVICE LETTERS | 1983年 / 4卷 / 04期
关键词：
D O I：
10.1109/EDL.1983.25664
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：102 / 104
页数：3
相关论文
共 50 条
  • [21] SELF-ALIGNED COSI2 AND TIW(N) LOCAL INTERCONNECT IN A SUB-MICRON CMOS PROCESS
    VERHAAR, RDJ
    BOS, AA
    VANLAARHOVEN, JMFG
    KRAAIJ, H
    WOLTERS, RAM
    APPLIED SURFACE SCIENCE, 1989, 38 (1-4) : 458 - 466
  • [22] UNDERCUT ISOLATION - TECHNIQUE FOR CLOSELY SPACED AND SELF-ALIGNED METALIZATION PATTERNS FOR MOS INTEGRATED-CIRCUITS
    BERGLUND, CN
    CLEMENS, JT
    NICOLLIAN, EH
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (09) : 1255 - 1260
  • [23] A SIMPLE SELF-ALIGNED SI BIPOLAR-TRANSISTOR FOR HIGH-SPEED INTEGRATED-CIRCUITS
    SCHREIBER, HU
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (06) : 1212 - 1213
  • [24] Electroluminescence measurement of at self-aligned gate GaAs MESFETs
    Niwa, H
    Ohno, Y
    Kishimoto, S
    Mizutani, T
    Yamazaki, H
    Taniguchi, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (3B): : 1343 - 1347
  • [25] A GAAS JUNCTION-GATE FECFET (J-FECFET) FOR THE DIGITAL INTEGRATED-CIRCUITS
    KIM, CT
    LEE, YJ
    KWON, YS
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (1B): : 556 - 559
  • [26] Behavior and analysis of deep sub-micron integrated circuits including self and mutual inductances
    Chowdhury, M. H.
    Ismail, Y. I.
    CIRCUITS SYSTEMS AND SIGNAL PROCESSING, 2008, 27 (01) : 23 - 34
  • [27] Behavior and Analysis of Deep Sub-micron Integrated Circuits Including Self and Mutual Inductances
    M. H. Chowdhury
    Y. I. Ismail
    Circuits, Systems & Signal Processing, 2008, 27 : 23 - 34
  • [28] A SELF-ALIGNED OHMIC METALLIZATION GAAS-GATE FET WITH INTEGRATED COUPLING DIODE
    YUEN, AT
    HU, EL
    LONG, SI
    SULLIVAN, GJ
    IEEE ELECTRON DEVICE LETTERS, 1987, 8 (06) : 272 - 274
  • [29] Dielectric Integration for Sub-Micron High Performance Integrated Circuits
    Wei William Lee Texas Instruments Inc North Central Expressway MS Dallas TX wlee spdc ti Com
    微电子技术, 1999, (03) : 41 - 47
  • [30] GAAS INTEGRATED-CIRCUITS
    MAGARSHACK, J
    REVUE TECHNIQUE THOMSON-CSF, 1986, 18 (04): : 671 - 675
12345