CHEMICAL ASPECTS OF PREPARATION OF THIN-FILMS OF HIGH-TEMPERATURE SUPERCONDUCTORS

The techniques for preparation of thin films of high - temperature superconductors can be divided into two groups: physical and chemical. In contrast to the physical methods, which are based on physical adsorption of vapours on substrates, in the chemical ones, the metals are deposited on heated substrates in course of thermal decomposition of suitable precursors. This paper gives a survey on the chemical background of the most important techniques from chemical methods: the chemical vapour deposition and aerosol spray deposition. The role of the applied technique, thermal stability of the precursors and some other experimental parameters on the structure and microstructure of the obtained thin films is discussed.