SCHOTTKY-BARRIER HEIGHT MEASUREMENTS OF TYPE-A AND TYPE-B NISI2 EPILAYERS ON SI

被引：17

作者：

HAUENSTEIN, RJ ^{[1
]}

SCHLESINGER, TE ^{[1
]}

MCGILL, TC ^{[1
]}

HUNT, BD ^{[1
]}

SCHOWALTER, LJ ^{[1
]}

机构：

[1] GE,CTR RES & DEV,SCHENECTADY,NY 12301

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573796

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：860 / 864

页数：5

共 15 条

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