A NEW HEMISPHERICAL RETARDING-FIELD ENERGY ANALYZER FOR QUANTITATIVE VOLTAGE MEASUREMENTS IN THE SEM

被引：21
作者：
NAKAMAE, K
FUJIOKA, H
URA, K
机构：
[1] Osaka Univ, Electron Beam Lab,, Suita, Jpn, Osaka Univ, Electron Beam Lab, Suita, Jpn
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1985年 / 18卷 / 05期
关键词：
ELECTRIC MEASUREMENTS - Voltage - MICROSCOPES; ELECTRON; -; Applications;
D O I：
10.1088/0022-3735/18/5/017
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A new retarding field energy analyzer for quantitative voltage measurements which functionally connects a uniform extracting field with a hemispherical analyzing field is described. The design principles are: (i) the centers of the hemispherical grids are to be put on the virtual source from which the secondary electron seems to come straight ahead; (ii) the radii of the hemispherical grids are to be chosen as large as possible within a restricted working distance in a scanning electron microscope; (iii) all the analyzed secondary electrons are to be collected. The accuracy of the voltage measurement has been improved by a factor of 10 compared with that in the plane-parallel retarding field energy analyzer.
引用
收藏
页码：437 / 443
页数：7
相关论文
共 19 条
[1]  
BALK LJ, 1976, SCANNING ELECTRON MI, V1, P615
[2]   QUANTITATIVE MEASUREMENT WITH HIGH TIME RESOLUTION OF INTERNAL WAVEFORMS ON MOS RAMS USING A MODIFIED SCANNING ELECTRON-MICROSCOPE [J].
FEUERBAUM, HP ;
KANTZ, D ;
WOLFGANG, E ;
KUBALEK, E .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1978, 13 (03) :319-325
[3]  
FEUERBAUM HP, 1979, SEM, V1, P285
[4]   IMPROVED TECHNIQUE FOR VOLTAGE MEASUREMENT USING SCANNING-ELECTRON MICROSCOPE [J].
FLEMMING, JP ;
WARD, EW .
ELECTRONICS LETTERS, 1970, 6 (01) :7-&
[5]   FUNCTION TESTING OF BIPOLAR ICS AND LSIS WITH THE STROBOSCOPIC SCANNING ELECTRON-MICROSCOPE [J].
FUJIOKA, H ;
NAKAMAE, K ;
URA, K .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1980, 15 (02) :177-183
[6]  
Fujioka H., 1981, Transactions of the Institute of Electronics and Communication Engineers of Japan, Section E (English), VE64, P295
[7]  
FUJIOKA H, 1983, SCANNING ELECTRON MI, V3, P1157
[8]   TECHNIQUE FOR LINEARIZATION OF VOLTAGE CONTRAST IN SCANNING ELECTRON MICROSCOPE [J].
GOPINATH, A ;
SANGER, CC .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1971, 4 (04) :334-&
[9]   HEMISPHERICAL RETARDING TYPE ENERGY ANALYZER FOR IC TESTING BY ELECTRON-BEAM [J].
GOTO, Y ;
ITO, A ;
FURUKAWA, Y ;
INAGAKI, T .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1030-1032
[10]  
MENZEL E, 1979, SCANNING ELECTRON MI, V1, P297
12