XPS STUDIES OF THIN POLYCYANURATE FILMS ON SILICON-WAFERS

被引：15
作者：
DIECKHOFF, S [1 ]
SCHLETT, V [1 ]
POSSART, W [1 ]
HENNEMANN, OD [1 ]
机构：
[1] FRAUNHOFER INST ANGEW MAT FORSCH,D-14513 TELTOW,GERMANY
来源：
FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1995年 / 353卷 / 3-4期
关键词：
D O I：
10.1007/BF00322052
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Thin films of a diandicyanato bisphenol A (DCBA) prepolymer on silicon substrates have been investigated. Angle dependent X-ray photoelectron spectroscopy reveals some thickness-dependent features, which lead to an adsorption model for the DCBA prepolymer molecules. The adsorption of the first layer is governed by the interaction of the triazine rings with the substrate surface.
引用
收藏
页码：278 / 281
页数：4
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