XPS STUDIES OF THIN POLYCYANURATE FILMS ON SILICON-WAFERS

被引：15

作者：

DIECKHOFF, S ^{[1
]}

SCHLETT, V ^{[1
]}

POSSART, W ^{[1
]}

HENNEMANN, OD ^{[1
]}

机构：

[1] FRAUNHOFER INST ANGEW MAT FORSCH,D-14513 TELTOW,GERMANY

来源：

FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1995年 / 353卷 / 3-4期

关键词：

D O I：

10.1007/BF00322052

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Thin films of a diandicyanato bisphenol A (DCBA) prepolymer on silicon substrates have been investigated. Angle dependent X-ray photoelectron spectroscopy reveals some thickness-dependent features, which lead to an adsorption model for the DCBA prepolymer molecules. The adsorption of the first layer is governed by the interaction of the triazine rings with the substrate surface.

引用

页码：278 / 281

页数：4

共 50 条

[1] ULTRATHIN FILMS OF CELLULOSE ON SILICON-WAFERS
SCHAUB, M
WENZ, G
WEGNER, G
STEIN, A
KLEMM, D
ADVANCED MATERIALS, 1993, 5 (12) : 919 - 922
[2] SAM STUDIES ON HIGH-TEMPERATURE ANNEALING OF VANADIUM THIN-FILMS ON OXIDIZED SILICON-WAFERS
CHEN, JR
SUNG, CP
YEH, FS
LIU, YC
WANG, CC
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 804 - 806
[3] SILICON-WAFERS
VANHOY, GA
MACHINE DESIGN, 1994, 66 (20) : 139 - 139
[4] Design of Thin Films Removal on Solar-Cells Silicon-Wafers Surface
Pa, P. S.
FRONTIERS OF MANUFACTURING AND DESIGN SCIENCE II, PTS 1-6, 2012, 121-126 : 805 - 809
[5] AMS STUDIES OF THE DIFFUSION OF CHLORINE IN SILICON-WAFERS
DATAR, SA
GOVE, HE
TENG, RTD
LAVINE, JP
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 99 (1-4): : 549 - 552
[6] PROPERTIES OF CHEMICALLY VAPOR-DEPOSITED TUNGSTEN THIN-FILMS ON SILICON-WAFERS
DIEM, M
FISK, M
GOLDMAN, J
THIN SOLID FILMS, 1983, 107 (01) : 39 - 43
[7] NEUTRON GUIDANCE BY INTERNAL REFLECTIONS IN THIN SILICON-WAFERS
GRUNING, U
MAGERL, A
MILDNER, DFR
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1992, 314 (01): : 171 - 177
[8] INFRARED SPECTROSCOPIC TECHNIQUES FOR QUANTITATIVE CHARACTERIZATION OF DIELECTRIC THIN-FILMS ON SILICON-WAFERS
FRANKE, JE
NIEMCZYK, TM
HAALAND, DM
SPECTROCHIMICA ACTA PART A-MOLECULAR AND BIOMOLECULAR SPECTROSCOPY, 1994, 50 (10) : 1687 - 1723
[9] MAGNETOELASTIC THIN-FILMS OF AMORPHOUS-ALLOYS, SPUTTERED ONTO SILICON-WAFERS
WALLACE, JL
JOURNAL OF APPLIED PHYSICS, 1993, 73 (10) : 5360 - 5362
[10] HIGH-TC SUPERCONDUCTING FILMS ON SILICON-WAFERS
KREIDER, KG
CLINE, JP
SHAPIRO, A
MORELAND, J
THIN SOLID FILMS, 1991, 195 (1-2) : 117 - 125

← 1 2 3 4 5 →