METAL-OXIDE-SEMICONDUCTOR NO2 SENSOR

被引：69
作者：
INOUE, T
OHTSUKA, K
YOSHIDA, Y
MATSUURA, Y
KAJIYAMA, Y
机构：
[1] Figaro Engineering Inc., Minoo-shi, Osaka, 562, Senba-nishi
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1995年 / 25卷 / 1-3期
关键词：
METAL OXIDE SEMICONDUCTOR; NITROGEN DIOXIDE SENSOR;
D O I：
10.1016/0925-4005(95)85087-2
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
A newly developed sensor for NO2 has been investigated from a practical point of view. Various metal oxide semiconductors have been examined and as a result it is found that WO3 shows the highest potentiality as an NO2 sensor for air-quality monitoring. Several approaches, such as introducing SiO2 binder, microprocessing techniques, heat-cleaning techniques and adopting a filter material, have been carried out, and consequently the performance of the WO3 sensor for NO2 is improved enough for practical use.
引用
收藏
页码：388 / 391
页数：4
相关论文
共 7 条
  • [1] TUNGSTEN OXIDE-BASED SEMICONDUCTOR SENSOR HIGHLY SENSITIVE TO NO AND NO2
    AKIYAMA, M
    TAMAKI, J
    MIURA, N
    YAMAZOE, N
    [J]. CHEMISTRY LETTERS, 1991, (09) : 1611 - 1614
  • [2] GAS-INDUCED ELECTRICAL-CONDUCTIVITY CHANGES IN METAL PHTHALOCYANINES
    JONES, TA
    BOTT, B
    [J]. SENSORS AND ACTUATORS, 1986, 9 (01): : 27 - 37
  • [3] DEVELOPMENT OF HIGH-PERFORMANCE SOLID-ELECTROLYTE SENSORS FOR NO AND NO2
    MIURA, N
    YAO, S
    SHIMIZU, Y
    YAMAZOE, N
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1993, 13 (1-3) : 387 - 390
  • [4] PRELIMINARY-RESULTS WITH A SILICON-BASED SURFACE ACOUSTIC-WAVE CHEMICAL SENSOR FOR NO2
    NIEUWENHUIZEN, MS
    NEDERLOF, AJ
    VELLEKOOP, MJ
    VENEMA, A
    [J]. SENSORS AND ACTUATORS, 1989, 19 (04): : 385 - 392
  • [5] NOMURA T, 1993, P S CHEM SENSORS, V2, P530
  • [6] EFFECT OF ADSORBED OXIDATIVE GASES ON ELECTRICAL-PROPERTIES OF EVAPORATED-FILMS OF PHTHALOCYANINES
    SADAOKA, Y
    SAKAI, Y
    YAMAZOE, N
    SEIYAMA, T
    [J]. DENKI KAGAKU, 1982, 50 (06): : 457 - 462
  • [7] SATAKE K, 1991, 3RD P INT M CHEM SEN, P334
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