SMALL RADIO-FREQUENCY DRIVEN MULTICUSP ION-SOURCE FOR POSITIVE HYDROGEN-ION BEAM PRODUCTION

被引：4

作者：

PERKINS, LT

HERZ, PR

LEUNG, KN

PICKARD, DS

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 04期

关键词：

D O I：

10.1063/1.1145052

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A compact, 2.5 cm diam rf-driven multicusp ion source has been developed and tested for H+ ion production in pulse mode operation. The source is optimized for atomic hydrogen ion species and extractable current. It is found that hydrogen ion beam current densities in excess of 650 mA/cm2 can be achieved with H+ species above 80%. The geometry and position of the porcelain-coated copper antenna were found to be of great significance in relation to the efficiency of the ion source.

引用

页码：1186 / 1188

页数：3

共 5 条

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[3] RF DRIVEN MULTICUSP ION-SOURCE FOR PULSED OR STEADY-STATE ION-BEAM PRODUCTION [J].

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[4]

LEUNG KN, 1992, 15TH P INT C HIGH EN

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