THE INFLUENCE OF HETEROGENEOUS AND HOMOGENEOUS REACTIONS IN LASER CHEMICAL-PROCESSING

被引:7
作者
KIRICHENKO, N
BAUERLE, D
机构
[1] Angewandte Physik, Johannes-Kepler-Universität Linz
关键词
D O I
10.1016/0040-6090(92)90897-K
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We present model calculations that describe the relative contributions of homogeneous and heterogeneous reactions to the total rate achieved in laser-chemical processing.
引用
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页码:1 / 7
页数:7
相关论文
共 10 条
[1]   ON THE REACTION-KINETICS IN LASER-INDUCED PYROLYTIC CHEMICAL-PROCESSING [J].
BAUERLE, D ;
LUKYANCHUK, B ;
PIGLMAYER, K .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1990, 50 (04) :385-396
[2]  
BAUERLE D, 1986, SPRINGER SERIES MATE, V1
[3]  
Ehrlich D.J., 1989, LASER MICROFABRICATI
[4]  
Gradshteyn IS, 1980, TABLES INTEGRALS SUM
[5]  
Hirschfelder J. O., 1954, MOL THEORY GASES LIQ
[6]   ON THE KINETICS OF NON-EQUIMOLECULAR REACTIONS IN LASER CHEMICAL-PROCESSING [J].
KIRICHENKO, N ;
PIGLMAYER, K ;
BAUERLE, D .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1990, 51 (06) :498-507
[7]   LASER-INDUCED CHEMICAL ETCHING OF SILICON IN CHLORINE ATMOSPHERE .1. PULSED IRRADIATION [J].
KULLMER, R ;
BAUERLE, D .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1987, 43 (03) :227-232
[8]   INVERSION EFFECTS IN THE KINETICS OF LASER-CHEMICAL PROCESSING [J].
LUKYANCHUK, B ;
PIGLMAYER, K ;
KIRICHENKO, N ;
BAUERLE, D .
PHYSICA A, 1992, 180 (3-4) :285-294
[9]  
MAGYOROSI P, 1988, APPL PHYS A, V45, P293
[10]   LCVD OF TUNGSTEN MICROSTRUCTURES ON QUARTZ [J].
TOTH, Z ;
KARGL, P ;
GRIVAS, C ;
PIGLMAYER, K ;
SZORENYI, T ;
BAUERLE, D .
APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1992, 54 (03) :189-192