OXYGEN ENHANCED ADHESION OF PLATINUM FILMS DEPOSITED ON THERMALLY GROWN ALUMINA SURFACES

被引：15
作者：
BUDHANI, RC
PRAKASH, S
DOERR, HJ
BUNSHAH, RF
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期
关键词：
D O I：
10.1116/1.573619
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：3023 / 3024
页数：2
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