CHEMICAL PROCESSES PROMOTED BY CO2 LASER-ASSISTED DECOMPOSITION OF SILANE ON SILICA SUBSTRATES

被引：5
|
作者：
TONNEAU, D [1 ]
PAULEAU, Y [1 ]
AUVERT, G [1 ]
机构：
[1] CTR NATL ETUD TELECOMMUN,F-38243 MEYLAN,FRANCE
来源：
JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 11期
关键词：
D O I：
10.1063/1.343280
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：4410 / 4413
页数：4
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