PULSED LASER IRRADIATION OF GAAS UNDER OXYGEN AND SILANE ATMOSPHERE - INCORPORATION, LOSSES, INFLUENCE OF NATIVE OXIDE

被引：15

作者：

COHEN, C

SIEJKA, J

BERTI, M

DRIGO, AV

BENTINI, GG

PRIBAT, D

JANNITTI, E

机构：

[1] UNIV PADUA,DIPT FIS G GALILEI,I-35100 PADUA,ITALY

[2] THOMSON CSF,F-91401 ORSAY,FRANCE

[3] CNR,CTR GAS IONIZZATI,I-35100 PADUA,ITALY

[4] LAMEL CNR,I-40126 BOLOGNA,ITALY

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 11期

关键词：

D O I：

10.1063/1.332998

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4081 / 4087

页数：7

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