CHEMICAL AND PHYSICAL PROCESSING OF ION-IMPLANTED INTEGRATED-CIRCUITS

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作者：

PLUNKETT, JC

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来源：

ACS SYMPOSIUM SERIES | 1985年 / 290卷

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中图分类号：

O6 [化学];

学科分类号：

0703 ;

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页码：127 / 163

页数：37

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