HIGHLY SENSITIVE POSITIVE ELECTRON RESISTS CONSISTING OF HALOGENATED ALKYL ALPHA-CHLOROACRYLATE SERIES POLYMER MATERIALS

被引：17

作者：

TADA, T ^{[1
]}

机构：

[1] VLSI TECHNOL RES ASSOC,COOPERAT LABS,KAWASAKI 213,JAPAN

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 04期

关键词：

D O I：

10.1149/1.2119857

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：912 / 917

页数：6

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