LASER DIAGNOSTICS OF PLASMA-ETCHING - MEASUREMENT OF CL2+ IN A CHLORINE DISCHARGE

被引：91
作者：
DONNELLY, VM
FLAMM, DL
COLLINS, G
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 03期
关键词：
D O I：
10.1116/1.571829
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：817 / 823
页数：7
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