Laser thermometry of transparent plane-parallel plates

被引:0
|
作者
Magunov, AN
机构
来源
INDUSTRIAL LABORATORY | 1995年 / 61卷 / 09期
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暂无
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Physical principles, limitations, and measuring characteristics of an optical thermometry method as applied to semiconductor and dielectric plates are discussed. The plane-parallel plate to be measured serves as a Fabry - Perot interferometer for a probing laser beam with its wavelength falling within a transmitting window of the material. The fringe shift of the reflection or transmission interference pattern of a heated or cooled plate can be used for measuring the plate temperature under nonstationary conditions.
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页码:537 / 541
页数:5
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