X-RAY-DIFFRACTION DETERMINATION OF TEXTURE AND INTERNAL-STRESSES IN MAGNETRON PVD MOLYBDENUM THIN-FILMS

被引：30

作者：

ZAOUALI, M ^{[1
]}

LEBRUN, JL ^{[1
]}

GERGAUD, P ^{[1
]}

机构：

[1] CTR ETUD NUCL GRENOBLE,DEPT MET,CTR ETUD & RECH MAT,F-38041 GRENOBLE,FRANCE

来源：

SURFACE & COATINGS TECHNOLOGY | 1991年 / 50卷 / 01期

关键词：

D O I：

10.1016/0257-8972(91)90185-Y

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Vapour deposited molybdenum thin films are highly textured and their orientation depends on the deposition parameters and in particular the substrate bias voltage during the deposition process. Lattice strains have been measured in the directions of the poles of the texture and for several reflecting planes. They are related to the stress state by single-crystal elastic constants. Stresses are found to be very high and compressive.

引用

页码：5 / 10

页数：6

共 7 条

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