PHASE-SELECTIVE CHEMICAL VAPOR-DEPOSITION OF BORON-CARBIDE BY NUCLEATION CONTROL ON PATTERNED SUBSTRATES

被引：7
作者：
JANSSON, U
CARLSSON, JO
MARKERT, LC
GREENE, JE
机构：
[1] UNIV ILLINOIS,DEPT MAT SCI,COORDINATED SCI LAB,URBANA,IL 61801
[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 06期
关键词：
D O I：
10.1116/1.576330
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：3172 / 3175
页数：4
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