CHROMIUM REDISTRIBUTION IN ION-IMPLANTED GAAS

被引:0
|
作者
YEE, CML [1 ]
NICHOLS, KB [1 ]
FEDDERS, PA [1 ]
WOLFE, CM [1 ]
PARK, YS [1 ]
机构
[1] USAF,AVION LAB,WRIGHT PATTERSON AFB,OH 45433
关键词
D O I
10.1016/0038-1101(84)90152-7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:453 / 457
页数:5
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