XPS STUDIES OF N+ IMPLANTED ALUMINUM

被引：30

作者：

RAOLE, PM ^{[1
]}

PRABHAWALKAR, PD ^{[1
]}

KOTHARI, DC ^{[1
]}

PAWAR, PS ^{[1
]}

GOGAWALE, SV ^{[1
]}

机构：

[1] UNIV BOMBAY,DEPT PHYS,BOMBAY 400098,INDIA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 23卷 / 03期

关键词：

D O I：

10.1016/0168-583X(87)90386-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：329 / 336

页数：8

共 11 条

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