RESONANT DIAPHRAGM PRESSURE MEASUREMENT SYSTEM WITH ZNO ON SI EXCITATION

被引：26

作者：

SMITS, JG

TILMANS, HAC

HOEN, K

MULDER, H

VANVUUREN, J

BOOM, G

机构：

[1] Twente Univ of Technology, Dep of, Electrical Engineering, Enschede,, Neth, Twente Univ of Technology, Dep of Electrical Engineering, Enschede, Neth

来源：

SENSORS AND ACTUATORS | 1983年 / 4卷 / 04期

关键词：

LOGIC CIRCUITS; INTEGRATED INJECTION - OSCILLATORS; SOLID STATE - PIEZOELECTRIC DEVICES - PRESSURE TRANSDUCERS - Design;

D O I：

10.1016/0250-6874(83)85068-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The principle of measuring pressure by means of a resonant diaphragm has been studied. An oscillator consisting of an integrated amplifier with a piezoelectrically driven diaphragm in its feedback loop has been built. The oscillator frequency is accurately proportional to the square of the pressure in the range 60 to 130 Torr. The piezoelectric driving material was sputtered zinc oxide. The whole system contains the sensor chip, the analog amplifier chip and the digital chip, all in compatible technology.

引用

页码：565 / 571

页数：7