TRANSFER LEAK STUDIES AND COMPARISONS OF PRIMARY LEAK STANDARDS AT THE NATIONAL-BUREAU-OF-STANDARDS AND SANDIA-NATIONAL-LABORATORIES

被引：15
作者：
HYLAND, RW [1 ]
EHRLICH, CD [1 ]
TILFORD, CR [1 ]
THORNBERG, S [1 ]
机构：
[1] SANDIA NATL LABS,ALBUQUERQUE,NM 87185
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词：
D O I：
10.1116/1.573922
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：334 / 337
页数：4
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